Better, faster: Improving semiconductor manufacturing equipment design through simulation
Thursday, January 12, 2017

The semiconductor manufacturing process involves hundreds of individual process steps, many of which involve liquid and/or gas flow. Designing the equipment to properly utilize the flow is challenging not only because of the complex geometry and multi-physics interactions, but also because process speed and reliability are paramount. Computational fluid dynamics (CFD) simulation can be a valuable tool to help the design engineer discover better designs, faster.

This On-Demand Webinar provides an overview of applications in the semiconductor manufacturing process to which CFD simulation can be applied. Additionally, the range of physical phenomena that can be simultaneously simulated in a multi-physics analysis will be explored - including multi-gas, multi-phase, chemical reactions, and moving bodies. A demonstration model will then illustrate the simulation process and show examples of the insight that can be gained.

Ruben Bons
Matthieu Stasia
Speaker Company: 
Siemens PLM